MEMS mechanical sensors
Stephen Beeby, et alTahun:
2004
Penerbit:
Artech House
Bahasa:
english
Halaman:
281
ISBN 10:
1580538738
ISBN 13:
9781580538732
Nama siri:
Microelectromechanical systems series
Fail:
PDF, 4.06 MB
IPFS:
,
english, 2004